SECS/GEM 產品介紹 - 友達(AUO) 模組
友達(AUO) 模組 特色
- 友達的自定義 Stream Function 皆已經模組化
- 使用者可以快速進行專案開發，大幅加快開發時間
- 支援各種機臺型態的 Stream Function (Array Machine, Array Measurement Machine,Cell Stand Alone Machine)
- 搭配模擬器可以快速達成AUO要求的通訊協議的傳送流程 Transaction Scenario(18.1 <--> 18.39)
Stream Functions
| Stream | Function Name |
|---|---|
| S1F65 | Equipment Status Change Report |
| S1F66 | Equipment Status Change Report Reply |
| S1F67 | Lot Status Change Report |
| S1F68 | Lot Status Change Report Reply |
| S1F69 | Online Summary Status Report) |
| S1F70 | ONLINE Summary Status Report Reply |
| S1F73 | Cassette Load Request/Complete Report |
| S1F74 | Cassette Load/Complete Report Reply |
| S1F75 | Cassette Unload Request/Complete Report |
| S1F76 | Cassette Unload Request/Complete Report Reply |
| S1F77 | Load/Unload Port Status Query |
| S1F78 | Load/Unload Port Status Query Reply |
| S1F79 | Request Online |
| S1F80 | Request Online Reply |
| S1F81 | Mask Information Report |
| S1F82 | Mask Information Report Reply |
| S1F83 | Mask Status Report |
| S1F84 | Mask Status Report Reply |
| S1F85 | Mask Status Inquire |
| S1F86 | Mask Status Inquire Reply |
| Stream | Function Name |
|---|---|
| S5F65 | Alarm Occurred/Released Report |
| S5F66 | Alarm Occurred/Removed Report Reply |
| S6F65 | Glass Process Data Report |
| S6F66 | Glass Process Data Report Reply |
| S6F67 | Operator ID Report |
| S6F68 | Operator ID Report Reply |
| S6F69 | Lot Process Data Report |
| S6F70 | Lot Process Data Report Reply |
| S7F1 | Remote Recipe Parameter Setting |
| S7F2 | Remote Recipe Setting Reply |
| S7F3 | Recipe Parameter Query (Upload) |
| S7F4 | Recipe Parameter Data Reply |
| S7F65 | Lot Process Data Transfer |
| S7F66 | Lot Process Command Transfer Reply |
| S7F67 | Inquire Last Modification Date/Time Of Recipe ID |
| S7F68 | Reply Last Modification Date/Time Of Recipe ID |
| S7F71 | Lot Process Data Request |
| S7F72 | Reply Lot Process Data Request |
| S7F73 | Lot Cancel Request |
| S7F74 | Lot Cancel Request Reply |
模擬器支援的 AUO Scenario
| 18.1 | 通訊協議的傳送流程 TRANSACTION SCENARIO |
| 18.2 | 當所有載入口不完全為空時，由機臺端要求之連線流程 Online Sequence From Equipment when it is not empty at all Ports |
| 18.3 | 控制模式的正常流程 Control Mode Normal Sequence |
| 18.4 | 監控模式的正常流程 Monitor Mode Normal Sequence |
| 18.5 | Abnormal Sequence (1) (S7F72 <> 0) |
| 18.6 | Abnormal Sequence (2) (S7F72 = 0, But Host send cancel) |
| 18.7 | Abnormal Sequence (3) (PPID Not Defined in Control mode) |
| 18.8 | Abnormal Sequence (4) (PPID Not Defined in Monitor mode) |
| 18.9 | Abnormal Sequence (5) ( S7F66 = 07H; Unmatched Slot No) |
| 18.10 | Abnormal Sequence (6) (Host send lot cancel after S7F65) |
| 18.11 | Abnormal Sequence (7) (Lot be cancelled by operator; RCODE=1) |
| 18.12 | Abnormal Sequence (8) (Lot be cancelled by operator; Process Wait) |
| 18.13 | Abnormal Sequence (9) (Lot be cancelled by HOST; Process Wait) |
| 18.14 | Abnormal Sequence (10) (Lot be cancelled by operator; Processing) |
| 18.15 | Abnormal Sequence (11) (Unmatched glass: Mapping sensor) |
| 18.16 | Abnormal Sequence (12) (Unmatched glass: No mapping sensor) |
| 18.17 | Abnormal Sequence (13) (Auto Hold Lot) |
| 18.18 | Abnormal Sequence (14) (Non-Auto Hold Lot: Don’t Hold Lot) |
| 18.19 | Abnormal Sequence (15) (Non-Auto Hold Lot: Hold Lot) |
| 18.20 | Abnormal Sequence (16) (Non-Auto Hold Lot: Re-measure) |
| 18.21 | Abnormal Sequence (17) (Light alarm) |
| 18.22 | Abnormal Sequence (18) (Serious alarm) |
| 18.23 | Abnormal Sequence (19) (S7F66 = 08H; Unmatched Chip No) |
| 18.24 | Abnormal Sequence (20) (T9 timeout on online sequence) |
| 18.25 | Abnormal Sequence (21) (T9 timeout on normal sequence 1:S7F71) |
| 18.26 | Abnormal Sequence (22) (T9 timeout on normal sequence 2:S7F65) |
| 18.27 | Abnormal Sequence (23) (Glass Re-measure: For Cell Stand Alone Only) |
| 18.28 | Abnormal Sequence (24) (S7F66 = 09H; Unmatched Panel Layout: For Cell Stand Alone Machine Only) |
| 18.29 | Trace Data Collection Sequence (For Array Machine Only) |
| 18.30 | Define Event Report Sequence (For Array Machine Only) |
| 18.31 | OFF-Line Sequence from Host |
| 18.32 | Online Sequence from Host |
| 18.33 | Lot be cancelled by Host Send ABORT Command: Process Wait |
| 18.34 | Lot be cancelled by Host Send ABORT Command: In Processing |
| 18.35 | Equipment be Hold by Host Send Hold Command |
| 18.36 | Port suspend by Host (Host send S2F21 $SUSPND after S7F65) |
| 18.37 | Port in Suspend State, Cancel at EQ |
| 18.38 | Port In Suspend State, Cancel by Host |
| 18.39 | Port In Suspend State, Resume by Host |