SECS/GEM 產(chǎn)品介紹 - PCBECI Equipment
PCBECI Equipment 特色
- 符合 .Net 開(kāi)發(fā)精神,程式極度靈活
- 良好的使用者介面,簡(jiǎn)單易懂,可快速上手
- 符合國(guó)內(nèi)第一大半導(dǎo)體廠的 GEM 以及 300mm 通訊規(guī)格
- GEM Driver 共分為 13 大模組,與 SECS/GEM Implemented Table 完全相同
- Host/EQP 各分為 13 大模組,由模組去選擇要使用的 Stream Function,更加容易上手
- 通訊的相容性極高,可以高度相容 Host 發(fā)過(guò)來(lái)的命令格式
- 每一個(gè) Host 發(fā)過(guò)來(lái)的命令可決定自行回覆或是系統(tǒng)自動(dòng)回覆
- 收到的 Stream Function 可選擇是否回應(yīng)同意或是拒絕,回應(yīng)方式極為簡(jiǎn)單,不需考慮編解碼的問(wèn)題
- 所有 SV,DV,EC,Alarm,Report,Event,Recipe Body 檔案整合到一個(gè) Excel 裡面,管理容易
- Driver 內(nèi)建 SECS 傳送過(guò)程的 Log 字串,使用者不需自己解碼
Compatibility
GEM Compliance Statement Fundamental GEM Requirements |
Support |
---|---|
Equipment Processing States | |
Host Initiated S1=F13/F14 Scenario | |
Event Notification | |
On-Line Identification | |
Error Messages | |
Control (Operator Initiated) | |
Establish Communication Additional Capabilities | |
Dynamic Event Report Configuration | |
Variable Data Collection | |
Trace Data Collection |
GEM Compliance Statement Fundamental GEM Requirements |
Support |
---|---|
Status Data Collection | |
Alarm Management | |
Remote Control | |
Equipment Constants | |
Process Program Management | |
Equipment Terminal Services Material Movement | |
Clock | |
Limits Monitoring | |
Spooling | |
Control (Host-Initiated) |
Stream Functions
Stream | Function Name |
---|---|
SXF0 | Abort Transaction |
S1F1 | Are You There Request |
S1F2 | On Line Data |
S1F3 | Establish Communications Request |
S1F4 | Establish Communications Request Acknowledge |
S1F5 | Formatted Status Request (FSR) |
S1F6 | Formatted Status Data (FSD) |
S1F11 | Status Variable Namelist Request |
S1F12 | Status Variable Namelist Reply |
S1F13 | Establish Communications Request |
S1F14 | Establish Communications Request Acknowledge |
S1F15 | Request OFF-LINE |
S1F16 | OFF-LINE Acknowledge |
S1F17 | Request ON-LINE |
S1F18 | ON-LINE Acknowledge |
S2F13 | Equipment Constant Request |
S2F14 | Equipment Constant Data |
S2F15 | New Equipment Constant Send |
S2F16 | New Equipment Constant Acknowledge |
S2F17 | Date And Time Data |
S2F18 | Date And Time Data Acknowledge |
S2F21 | Remote Command Send (RCS) |
S2F22 | Remote Command Acknowledge (RCA) |
S2F23 | Host Initiated Trace Send |
S2F24 | Trace Initiated Acknowledge. |
S2F29 | EC Name List Request |
S2F30 | EC Name List Request Acknowledge |
S2F31 | Date And Time Set Request |
S2F32 | Date And Time Set Acknowledge |
S2F33 | Define Report |
S2F34 | Define Report Acknowledge |
S2F35 | Link Event Report |
S2F36 | Link Event Report Acknowledge |
S2F37 | Enable/Disable Event Report |
S2F38 | Enable/Disable Event Report Acknowledge |
S2F41 | Host Command Send |
S2F42 | Host Command Acknowledge |
Stream | Function Name |
---|---|
S5F1 | Alarm Report Send |
S5F2 | Alarm Report Acknowledge |
S5F3 | Enable/disable Alarm Send |
S5F4 | Enable/disable Alarm Acknowledge |
S5F5 | List Alarms Request |
S5F6 | List Alarm Data |
S5F7 | List Enable Alarm Request |
S5F8 | List Enable Alarm Request Acknowledge |
S6F1 | Trace Data Send |
S6F2 | Trace Data Acknowledge |
S6F11 | Event Report Send |
S6F12 | Event Report Acknowledge |
S6F15 | Event Report Request |
S6F16 | Event Report Data |
S6F19 | Individual Report Request |
S6F20 | Individual Report Data |
S7F1 | Process Program Load Inquire |
S7F2 | Process Program Load Grant |
S7F3 | Process Program Send |
S7F4 | Process Program Acknowledge |
S7F5 | Process Program Reques |
S7F6 | Process Program Data |
S7F17 | Delete Process Program Send |
S7F18 | Delete Process Program Acknowledge |
S7F19 | Current EPPD Request |
S7F20 | Current EPPD Data |
S7F23 | Formatted Process Program Send |
S7F24 | Formatted Process Program Data |
S7F25 | Formatted Process Program Request |
S7F26 | Formatted Process Program Data |
S10F1 | Terminal Request |
S10F2 | Terminal Request Acknowledge |
S10F3 | Terminal Display, Single (VTN) |
S10F4 | Terminal Display, Single Acknowledge (VTA) |
S10F5 | Terminal Display, Multi-Block (VTN) |
S10F6 | Terminal Display, Multi-Block Acknowledge (VMA) |