SECS/GEM PRODUCTS -
InnoLux Module
Feature of InnoLux Module
- Support many kinds of equipment mode which meets InnoLux's need.
- Easy to use overloaded functions
- Support many kinds of replying mode.
- Saving lots of time for developers.
Stream Functions
Stream |
Function Name |
S1F65 |
Tool/Chamber Status Change Report |
S1F66 |
Reply Tool/Chamber Status Change |
S1F67 |
Lot Status Change Report |
S1F68 |
Reply Lot Status Change Report |
S1F69 |
Online Summary Status Report |
S1F70 |
Reply Online Summary Status Report |
S1F71 |
Mapping Data Report |
S1F72 |
Reply Mapping Data Report |
S1F73 |
Port Status Change Report |
S1F74 |
Reply Port Status Change |
S1F75 |
Transfer Mode Change Report |
S1F76 |
Reply Transfer Mode Change |
S1F77 |
Load/Unload Port Status Query |
S1F78 |
Load/Unload Port Status Query Reply |
S1F81 |
Mask Load/Unload Report |
S1F82 |
Reply Mask Load/Unload Report |
S1F83 |
Mask List Report |
S1F84 |
Reply Mask List Report |
S1F85 |
Mask List Request |
S1F86 |
Reply Mask List Request |
S1F89 |
Mask Status Change Report |
S1F90 |
Reply Mask Status Change Report |
Stream |
Function Name |
S1F95 |
Glass Remove Report |
S1F96 |
Reply Glass Remove Report |
S5F65 |
Alarm Report |
S5F66 |
Alarm Report Acknowledge |
S6F9 |
Glass Re-location Report |
S6F10 |
Glass Re-location Report Reply |
S6F65 |
Glass Process Data Report |
S6F65 |
Glass Process Data Report Reply |
S6F69 |
Lot Process Data Report |
S6F69 |
Lot Process Data Report Reply |
S7F65 |
Lot Process Data Transfer |
S7F65 |
Lot Process Data Transfer Reply |
S7F67 |
Inquire Last Modification Date/Time of Recipe ID |
S7F67 |
Reply Last Modification Date/Time of Recipe ID |
S7F71 |
Lot Process Command Data Request |
S7F72 |
Reply Lot Process Command Data Request |
S7F73 |
Lot Cancel Report |
S7F74 |
Lot Cancel Report Reply |
S7F75 |
Remote Recipe Parameter Setting |
S7F75 |
Remote Recipe Parameter Setting Reply |
S7F77 |
Recipe Parameter Query |
S7F77 |
Recipe Parameter Query Reply |
S7F79 |
Glass Process Command Data Request |
S7F79 |
Reply Glass Process Command Data Request |